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Synthesis and characterisations of sol-gel-derived LaNiO3 thin-film electrodes on Si substrates
by Vu Thu Hien; Nguyen Duc Minh; Vu Ngoc Hung
International Journal of Nanotechnology (IJNT), Vol. 12, No. 5/6/7, 2015


Abstract: We present the fabrication and characterisation of conductive LaNiO3 (LNO) thin films, deposited on different substrates including Si(100), SiO2/Si(100) and Pt/Ti/SiO2/Si(100) by the sol-gel spin-coating technique. Deposition parameters, such as the sol concentration and annealing temperature as well as the number of coating layers, were optimised to obtain the desired film quality. X-ray diffraction analysis showed that crystalline and highly (110) oriented LNO thin films were obtained after annealing at 750C. Scanning electron microscopy images revealed that LNO films show a dense and smooth surface. Moreover, the crystallites' size increased with increasing film thickness, which resulted in the enhancement of electrical conductivity. The well-controlled crystallinity and low resistivity of 3.73 10-4Ω.cm, measured on a film thickness of 200 nm, indicate that LNO thin films can be used as the template and electrode for the fabrication of integrated piezoelectric thin-films on Si substrates.

Online publication date: Sun, 08-Mar-2015


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