The full text of this article

 

Thermal characterisation of high-aspect-ratio nanoheaters using IR thermography
by Jun Hyung Lee; Young Hak Cho; Dong-Young Jang; Seok Kwan Hong; Jeong Jin Kang
International Journal of Nanomanufacturing (IJNM), Vol. 10, No. 5/6, 2014

 

Abstract: Recently, micro/nanoheater have been used and studied in various fields such as sensors. In particular, they have become important in biology and medicine. In this paper, we propose a novel measurement method which can indirectly measure the temperature distribution of a nanoheater's surface from side temperature measurements using infrared microscopes. Two different types of nanoheaters are fabricated and their thermal behaviours are analysed and characterised. They are fabricated in a top-down approach using silicon-on-insulator wafers and basic MEMS processes. Nanoheaters with a high-aspect-ratio are fabricated: a width of 200 nm, length of 100 µm and height of 30 µm. The nanoheater's surface is doped with boron by ion implantation for joule heating. Their thermal profile depending on their heat sink type was investigated. In conclusions, it is expected that a nanoheater with exact temperature control and thermally efficient structural design can be applied for bio-molecule manipulation.

Online publication date: Thu, 11-Dec-2014

 

is only available to individual subscribers or to users at subscribing institutions.

 
Existing subscribers:
Go to Inderscience Online Journals to access the Full Text of this article.

 
Pay per view:
If you are not a subscriber and you just want to read the full contents of this article, buy online access here.

 
Complimentary Subscribers, Editors or Members of the Editorial Board of the International Journal of Nanomanufacturing (IJNM):
Login with your Inderscience username and password:

 

    Username:        Password:         

Forgotten your password?


 
Want to subscribe?
A subscription gives you complete access to all articles in the current issue, as well as to all articles in the previous three years (where applicable). See our Orders page to subscribe.

 
If you still need assistance, please email subs@inderscience.com