The full text of this article

 

Towards fast AFM-based nanometrology and nanomanufacturing
by Georg Schitter; Juergen Steininger; Friedjof C.A. Heuck; Urs Staufer
International Journal of Nanomanufacturing (IJNM), Vol. 8, No. 5/6, 2012

 

Abstract: Application of atomic force microscopes (AFMs) in production processes for nanometrology and nanomanufacturing is still hampered by the slow operation speed, by the low level of automation, and by insufficient control over production parameters for material deposition. This contribution discusses some recent development to improve the speed of AFMs by means of mechatronic system integration to improve the scanning speed and the bandwidth for controlling the probe-sample interaction, as well as advances from MEMS to functionalise AFM-probes for selective measurements and dip-pen nanolithography. The improved performance and functionality of the resulting prototype AFMs will enable better use of AFM technology in nanomanufacturing.

Online publication date: Thu, 20-Dec-2012

 

is only available to individual subscribers or to users at subscribing institutions.

 
Existing subscribers:
Go to Inderscience Online Journals to access the Full Text of this article.

 
Pay per view:
If you are not a subscriber and you just want to read the full contents of this article, buy online access here.

 
Complimentary Subscribers, Editors or Members of the Editorial Board of the International Journal of Nanomanufacturing (IJNM):
Login with your Inderscience username and password:

 

    Username:        Password:         

Forgotten your password?


 
Want to subscribe?
A subscription gives you complete access to all articles in the current issue, as well as to all articles in the previous three years (where applicable). See our Orders page to subscribe.

 
If you still need assistance, please email subs@inderscience.com