In-situ scanning white light interferometry employing dual-sensing configuration and active fringe-locking strategy
by Liang-Chia Chen; Sheng-Lih Yeh; Abraham Mario Tapilouw; Kun-Feng Lee
International Journal of Nanomanufacturing (IJNM), Vol. 8, No. 1/2, 2012

Abstract: This article presents new white light interferometry with vibration-resistant capability achieved by in-situ optical detection and closed-loop feedback strategies. Scanning white light interferometry (SWLI) has become a popular measurement method due to its long measurement range and high measurement accuracy. However, the drawback of in-situ interferometry lies mainly in unacceptable measurement errors caused by environmental disturbance such as mechanical vibration and acoustic noise. This paper describes a method employing dual-sensing configuration and active fringe-locking strategy to overcome the issue. A specially designed band-pass filter is employed to generate a high-coherent light field for real-time detecting vibratory displacement. As proven by the experimental results, the maximum measurement error caused by vibration can be effectively reduced by more than six folds.

Online publication date: Sun, 01-Jan-2012

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