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Development of novel integrated bio/chemical sensor systems using chalcogenide glass materials
by Laeticia Petit, Nathan Carlie, Bodgan Zdyrko, Igor Luzinov, Kathleen Richardson, Juejun Hu, Anu Agarwal, Lionel Kimerling, Troy Anderson, Martin Richardson
International Journal of Nanotechnology (IJNT), Vol. 6, No. 9, 2009


Abstract: This paper reviews ongoing progress in the design and fabrication of new, on-chip, low loss planar molecular sensors. We report the details of device design, material selection and manufacturing processes used to realise high-index-contrast (HIC), compact micro-disk resonators. These structures have been fabricated in thermally evaporated As- and Ge-based chalcogenide glass films with PDMS (polydimethylsiloxane) micro-fluidic channels using standard UV lithography. Discussed are findings that demonstrate that our novel chalcogenide-based micro-fluidic device can be used as highly sensitive refractive index sensors.

Online publication date: Wed, 24-Jun-2009


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