MoO3:In2O3 binary oxide thin films as CO gas sensor Online publication date: Mon, 12-Oct-2020
by Nimba B. Kothawade; Vikas V. Deshmane; Arun V. Patil
International Journal of Microstructure and Materials Properties (IJMMP), Vol. 15, No. 3, 2020
Abstract: The aim of the study was to understand gas sensing properties of thin films of molybdenum trioxide and indium oxide (MoO3-In2O3) indifferent normality proportions. Thin films were prepared by spray pyrolysis technique on glass substrates at 400°C. The films were characterised using X-ray diffraction, scanning electron microscope and energy dispersive analysis by X-ray spectra. The electrical and gas sensing properties of the films were studied using static gas sensing apparatus. The resistivity of films increased by adding MoO3 as the dopant in In2O3. The maximum resistivity of film was found 1.75 × 104 Ωm for 0.3N (MoO3) and 0.1N (In2O3) binary oxide films. The films were tested against five different target gases. The composition ratio 0.3N:0.1N films showed the 70.50% sensitivity for 300 ppm CO gas at 150°C. The response time (15s) and recovery time (25s) was found to be quick.
Online publication date: Mon, 12-Oct-2020
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