The full text of this article:

Bulk micromachining for SOI based microsystems using double side XeF₂ etching
by Avinash K. Bhaskar, Muthukumaran Packirisamy, Rama B. Bhat
International Journal of Manufacturing Technology and Management (IJMTM), Vol. 13, No. 2/3/4, 2008
Abstract: Microfabrication is pivotal in any microsystem synthesis. Even through silicon is the most common material used in the Micro Electro Mechanical System (MEMS) foundry, Silicon on Insulator (SOI) wafers are very promising for the fabrication of Micro Opto Electro Mechanical System (MOEMS) Devices such as micromirrors due to their better optical reflectivity, low residual stress and compatibility with silicon microfabrication processes. The present work explores the possibility of patterning and using controlled pulse etching method involving Xenon difluoride (XeF₂) to etch SOI wafers to realise micromirrors. Pulse-etching method is proposed due to its better control and etching uniformity. This paper also presents the process flow for the fabrication of SOI based micromirrors through double side XeF₂ micromachining which involves mask preparation, photolithography and pulse etching. The presented results also include etch characteristics obtained on SOI wafers.

is only available to individual subscribers or to users at subscribing institutions.

Pay per view: If you are not a Subscriber and you just want to read the full contents of this article, please click here to purchase online access to the full-text of this article. Please allow 3 days + mailing time. Current price for article is Thirty Euros (€30)

Complimentary Subscribers, Editors or Members of the Editorial Board of the International Journal of Manufacturing Technology and Management (IJMTM) journal, that have been redirected here, please check if you have a registered username/password subscription with Inderscience. If that is the case, please Login:

If you are not yet a Subscriber to International Journal of Manufacturing Technology and Management (IJMTM) journal, you can subscribe by following a few simple and quick steps. A subscription will give you complete access to all articles in the current issue, as well as to all articles in the previous three years, where applicable. Click here to subscribe.

Should you experience further difficulties or have any enquiries, please email subs@inderscience.com