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International Journal of Surface Science and Engineering

2009 Vol. 3 No. 3

Special Issue on Advances in Intelligent Nano-Measurement Technology

Guest Editors: Dr. Wei Gao, Dr. Kiyoshi Takamasu, Dr. Yasuhiro Takaya and Dr. Satoru Takahashi

 

Editorial
PagesTitle and authors
160-177Evaluation of gear engagement accuracy by Transmission Error with sub-microradian resolution
Syuhei Kurokawa, Yasutsune Ariura, Yoji Matsukawa, Toshiro Doi
DOI: 10.1504/IJSURFSE.2009.026607

178-194Study on residual resist layer thickness measurement for Nanoimprint Lithography based on near-field optics
Satoru Takahashi, Shuichi Minamiguchi, Toshiyuki Nakao, Shin Usuki, Kiyoshi Takamasu
DOI: 10.1504/IJSURFSE.2009.026608

195-207Scanning in situ self-calibration method for the two-probe method of straightness measurement
Yoshikazu Arai, Jung Chul Lee, Chun Hong Park
DOI: 10.1504/IJSURFSE.2009.026609

208-226Fundamental study on the position detection signal analysis for the fibre optical trapping probe
S.I. Eom, T. Hayashi, Y. Takaya
DOI: 10.1504/IJSURFSE.2009.026610

227-241Improvement of a Fast Tool Control unit for cutting force measurement in diamond turning of micro-lens array
Young Jin Noh, Yoshikazu Arai, Wei Gao
DOI: 10.1504/IJSURFSE.2009.026611

242-252Proposal of concurrent measurement method for spindle radial, axial and angular motions using concentric grating interferometers
Muhummad Madden, Masato Aketagawa, Yuria Ohkubo, Shohei Kimura, Hideki Maruyama, Satoru Higuchi, Eiki Okuyama
DOI: 10.1504/IJSURFSE.2009.026612

253-271Precision positioning control of a Sawyer motor-based two-axis planar motion stage
Songyi Dian, Yoshikazu Arai, Wei Gao
DOI: 10.1504/IJSURFSE.2009.026613