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Vol. 1

International Journal of Nanomanufacturing

2012 Vol. 8 No. 1/2

Special Issue on Precision Micro- and Nano-Metrology for Nanomanufacturing

Guest Editors: Professor Wei Gao, Professor Richard Leach and Professor Harald Bosse


PagesTitle and authors
4-22Nanometrology at PTB in support of process control of nanoscale features in semiconductor manufacturing
Bernd Bodermann; Frank Scholze; Jens Flügge; Hermann Gross; Harald Bosse
DOI: 10.1504/IJNM.2012.044651

23-30Improvement of free-spectral-range measurement for Fabry-Perot cavity using phase modulation technique
Masato Aketagawa; Hiroshi Iwata; Tuan Quoc Banh; Kenji Hirata
DOI: 10.1504/IJNM.2012.044652

31-39GPU-accelerated white-light scanning interferometer for large-area, high-speed surface profile measurements
Joonho You; Young-Jin Kim; Seung-Woo Kim
DOI: 10.1504/IJNM.2012.044653

40-53In-situ scanning white light interferometry employing dual-sensing configuration and active fringe-locking strategy
Liang-Chia Chen; Sheng-Lih Yeh; Abraham Mario Tapilouw; Kun-Feng Lee
DOI: 10.1504/IJNM.2012.044654

54-66Development of nanoparticle sizing system integrated with optical microscopy using fluorescence polarisation
Terutake Hayashi; Yasuhiro Takaya; Masaki Michihata
DOI: 10.1504/IJNM.2012.044655

67-86The system and the mechatronics of a pagoda type micro-CMM
Kuang-Chao Fan; Fang Cheng; Hung-Yu Wang; Jyun-Kuan Ye
DOI: 10.1504/IJNM.2012.044656

87-105Fabrication of micro-ball styluses for scanning-type surface form metrology
Yuki Shimizu; Bin Xu; Wei Gao
DOI: 10.1504/IJNM.2012.044657

106-122Establishment of a measuring station on a diamond turning machine for in-process cutting edge inspection of single point diamond micro-tools
SungHo Jang; Takemi Asai; Yuki Shimizu; Wei Gao
DOI: 10.1504/IJNM.2012.044659

123-139Nanomanufacturing of radial grating patterns by nanoimprint with a silicon mould for rotational angle measurement of micro gears
Syuhei Kurokawa; Morihisa Hoga; Toshiro Doi
DOI: 10.1504/IJNM.2012.044660

140-160A study of characterisation of surface generation in ultra-precision polishing using power spectrum analysis
L.T. Ho; C.F. Cheung
DOI: 10.1504/IJNM.2012.044661

161-172Probe type micro magnetic manipulator utilising localised magnetic field with closed-loop magnetic path
So Ito; Kenji Ito; Futoshi Iwata
DOI: 10.1504/IJNM.2012.044663