Title: Water dissolution ultra-precision polishing of KDP crystal and its precision cleaning

Authors: Yuchuan Chen; Hang Gao; Xu Wang; Xiaoji Teng

Addresses: School of Mechanical Engineering, Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian, Liaoning, 116024, China ' School of Mechanical Engineering, Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian, Liaoning, 116024, China ' School of Mechanical Engineering, Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian, Liaoning, 116024, China ' School of Mechanical Engineering, Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian, Liaoning, 116024, China

Abstract: KDP crystal is a kind of excellent electro-optic material used in many laser facilities, which is also widely acknowledged to be extremely hard to machine. In this work, we developed a process to finish KDP crystal to a precision and clean engineering specimen. A micro-nano water dissolution principle and its planarisation mechanism in the machining process are illustrated, which turns the disadvantaged deliquescence property of KDP crystal into the driving force for ultra-precision polishing of the crystal. Micro emulsion fluid with nano water nuclei can precisely control the material removal and realize the selective polishing, thus forming a super smooth and precise surface. Then a subsequent cleaning process developed specially for this ultra-precision polishing method helps to get rid of the polishing fluid, and finally reduces the residue off the crystal to a clean and tidy surface with 1.964 nm rms roughness for engineering application.

Keywords: KDP crystal; water dissolution mechanism; ultra-precision polishing; precision cleaning; FTIR spectrum.

DOI: 10.1504/IJNM.2018.089177

International Journal of Nanomanufacturing, 2018 Vol.14 No.1, pp.23 - 33

Received: 17 May 2016
Accepted: 07 Nov 2016
Published online: 09 Jan 2018 *

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