Int. J. of Nanomanufacturing   »   2014 Vol.10, No.5/6

 

 

Title: Study on die polishing method of microstructured moulds applying low frequency vibration

 

Authors: Weimin Lin; Sze Keat Chee; Takeshi Yano; Hirofumi Suzuki; Toshiro Higuchi

 

Addresses:
Gunma University, 29-1 Hon-cho, Ota, Gunma, 373-0057, Japan
Mechano Transformer Corporation, 7-7, Shin-kawasaki, Saiwai-ku, Kawasaki, Kanagawa, 212-0032, Japan
Mechano Transformer Corporation, 7-7, Shin-kawasaki, Saiwai-ku, Kawasaki, Kanagawa, 212-0032, Japan
Chubu University, 1200, Matsumoto-cho, Kasugai, Aichi, 487-8501, Japan
The University of Tokyo, 7-3-1, Hongo, Bunkyo-ku, Tokyo, 113-8656, Japan

 

Abstract: Demands of precision moulds with complicated microstructures for digital devices such as DVD pick-up system, and medical devices such as micro-TAS and solar optics, etc. are increasing. To enhance precision, the structured moulds must be polished after grinding or cutting in order to improve the surface roughness. In this paper, a two-dimensional low frequency vibration (LFV) polishing actuator using PZT is proposed and developed. The LFV consists of four mechanical amplitude magnified actuators, a multilayer stacked piezoelectric actuator (PZT) incorporated with mechanical transformer, and a centre piece. In the polishing experiments, HIPM workpieces were polished with WA slurry by the rotation and revolution type polishing method (RRP). The surface roughness of the work pieces and material removal amount (polished amount) was also evaluated. From the experimental results, it was found that the application of low frequency vibration is useful for realising higher precision in the polishing of microstructured moulds.

 

Keywords: low frequency vibration; LFV; microstructure; polished amount; polishing area; die polishing; microstructured moulds; precision moulds; surface roughness; surface quality; piezoelectric actuators; PZT; mechanical amplitude magnified actuators.

 

DOI: 10.1504/IJNM.2014.066280

 

Int. J. of Nanomanufacturing, 2014 Vol.10, No.5/6, pp.424 - 431

 

Available online: 11 Dec 2014

 

 

Editors Full text accessAccess for SubscribersPurchase this articleComment on this article