Title: Energy and exergy analyses of atomic layer deposition of Al₂O₃ nano-film process

Authors: Tao Li; Fenfen Wang; Hong-Chao Zhang; Chris Yuan

Addresses: School of Mechanical Engineering, Dalian University of Technology, 116024, Dalian, China ' School of Mechanical Engineering, Dalian University of Technology, 116024, Dalian, China ' Department of Industrial Engineering, Texas Tech University, Lubbock, TX 45005, USA ' Department of Mechanical Engineering, University of Wisconsin, Milwaukee, 53201, USA

Abstract: In this paper, energy and exergy analyses of atomic layer deposition (ALD) of Al₂O₃ nano-film has been conducted. First, based on the first law of thermodynamics, the energy flow in ALD of Al₂O₃ nano-film preparation system is analysed. Second, the exergy flow in the system is analysed based on the second law of thermodynamics. Two different kinds of exergy efficiencies are introduced, including the simplest definition for exergy efficiency and the degree of perfection. In the end, the exergy efficiency in this system is calculated by using the two kinds of exergy efficiency calculation methods. The results of analyses on the ALD of the Al₂O₃ nano-film process demonstrate the extremely low efficiency of energy in the ALD system. Thus, it is necessary and meaningful to find ways to reduce energy consumption and improve the energy utilisation efficiency in ALD operation process.

Keywords: exergy analysis; energy analysis; ALD; atomic layer deposition; Al2O3 nanofilms; first law of thermodynamics; energy flow; second law of thermodynamics; exergy flow; exergy efficiency; degree of perfection; energy consumption; energy efficiency; alumina; nanotechnology aluminum oxide.

DOI: 10.1504/IJEX.2014.065107

International Journal of Exergy, 2014 Vol.15 No.1, pp.62 - 75

Received: 08 Apr 2013
Accepted: 07 Aug 2013
Published online: 30 Apr 2015 *

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