Title: Spray deposition of PVDF layers with application in MEMS pressure sensors

Authors: Georgi D. Kolev; Mariya P. Aleksandrova; Krassimir H. Denishev

Addresses: Department of Microelectronic, Faculty of Electronic Engineering and Technologies Technical University of Sofia, blvd. Kliment Ohridski 8, Sofia 1797, Bulgaria ' Department of Microelectronic, Faculty of Electronic Engineering and Technologies Technical University of Sofia, blvd. Kliment Ohridski 8, Sofia 1797, Bulgaria ' Department of Microelectronic, Faculty of Electronic Engineering and Technologies Technical University of Sofia, blvd. Kliment Ohridski 8, Sofia 1797, Bulgaria

Abstract: Layers of piezoelectrical polymer polyviniliden fluoride (PVDF) were prepared by spray deposition technique on silicon, glass substrates and glass substrates with thin aluminium (Al) and cooper (Cu) films. The deposition temperature of the substrates and the concentration of the solution were investigated and their influence on the adhesion to the surface and the film's morphology were explored. The pre- and post deposition temperature treatment of the sample was conducted and the changes in the layer's behaviour was detected.

Keywords: polyviniliden fluoride; PVDF; pressure sensors; microelectromechanical systems; MEMS; piezoelectric effect; spray deposition; deposition temperature; surface adhesion.

DOI: 10.1504/IJRIS.2013.058188

International Journal of Reasoning-based Intelligent Systems, 2013 Vol.5 No.3, pp.177 - 182

Published online: 09 Dec 2013 *

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