Int. J. of Nanomanufacturing   »   2012 Vol.8, No.5/6

 

 

Title: Quantitative characterisation of nanoimprinted structures using metrological large range AFM and CDAFM

 

Authors: Gaoliang Dai; Hans-Ulrich Danzebrink; Jens Fluegge; Harald Bosse

 

Addresses:
Physikalisch-Technische Bundesanstalt, 38116 Braunschweig, Germany
Physikalisch-Technische Bundesanstalt, 38116 Braunschweig, Germany
Physikalisch-Technische Bundesanstalt, 38116 Braunschweig, Germany
Physikalisch-Technische Bundesanstalt, 38116 Braunschweig, Germany

 

Abstract: Nanoimprint lithography (NIL) is a promising method for low-cost, high throughput patterning of nanoscale devices and systems. Quantitative characterisation of nanoimprinted structures is of high importance not only to ensure the quality of the structures but also to monitor/control the manufacturing processes. In this paper, two atomic force microscopes (AFMs) are presented which are applicable for the related measurement purpose. One is a metrological large range AFM (met. LR-AFM) with a measurement volume of (25 × 25 × 5) mm³. The other instrument is a critical dimension AFM (CDAFM) with a specially developed vector approach probing (VAP) strategy for 3D measurements of nanostructures. The met. LR-AFM had assisted in diagnosing the quality issues of NIL manufacturing processes. Furthermore, the calibration of two nanoscale standards fabricated by NIL is presented, taking into account influences of defects and stitching errors. Other parameters of the nanoimprinted structures like e.g. CD, corner rounding, sidewall slope as well as line edge roughness were quantitatively determined.

 

Keywords: nanoimprint lithography; NIL; nanoscale dimensional metrology; atomic force microscopy; AFM; critical dimension atomic force microscope; CDAFM; nanolithography; nanotechnology; nanoimprinted structures; characterisation; vector approach probing; VAP; nanomanufacturing.

 

DOI: 10.1504/IJNM.2012.051112

 

Int. J. of Nanomanufacturing, 2012 Vol.8, No.5/6, pp.372 - 391

 

Submission date: 12 Dec 2011
Date of acceptance: 06 Aug 2012
Available online: 20 Dec 2012

 

 

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