Int. J. of Nanomanufacturing   »   2012 Vol.8, No.5/6

 

 

Title: Surface and coordinate measurements with nanomeasuring machines

 

Authors: Tino Hausotte; Felix-Gerhard Balzer; Nataliya Vorbringer-Dorozhovets; Eberhard Manske

 

Addresses:
Manufacturing Metrology, University Erlangen-Nuremberg, Naegelsbachstrasse 25, D-91052 Erlangen, Germany
Institute of Process Measurement and Sensor Technology, Ilmenau University of Technology, P.O. Box 100 565, D-98684 Ilmenau, Germany
Institute of Process Measurement and Sensor Technology, Ilmenau University of Technology, P.O. Box 100 565, D-98684 Ilmenau, Germany
Institute of Process Measurement and Sensor Technology, Ilmenau University of Technology, P.O. Box 100 565, D-98684 Ilmenau, Germany

 

Abstract: The nanomeasuring machine (NMM-1) was designed for surface and coordinate measurements within a measurement volume of 25 mm × 25 mm × 5 mm. The machine is equipped with three homodyne plane-mirror miniature interferometers for the measurement of the displacement of a movable corner mirror. The object being measured is placed on the corner mirror, which is positioned by a three-axis drive system. Various measurement tasks are possible depending on the probe system installed. Most of the sensors utilised are one-dimensional tactile or optical surface sensors or probes. In recent years, measurements of three-dimensional features and sidewalls are becoming more important. For these more complex measurements, probe systems with two or three directions of sensitivity are necessary and were therefore integrated into the NMM-1. The article gives an overview of the operation and properties of the NMM-1, its use for surface and coordinate measurements, of integrated probe systems and of two probing systems developed.

 

Keywords: nanopositioning; nanomeasuring; nanometrology; interferometer; coordinate measurements; surface measurements; Abbe comparator principle; machine design; coordinate measuring; nanotechnology; tactile sensors; optical sensors; surface sensors; tactile probes; optical probes; probing systems.

 

DOI: 10.1504/IJNM.2012.051110

 

Int. J. of Nanomanufacturing, 2012 Vol.8, No.5/6, pp.467 - 483

 

Submission date: 01 Dec 2011
Date of acceptance: 12 Aug 2012
Available online: 20 Dec 2012

 

 

Editors Full text accessAccess for SubscribersPurchase this articleComment on this article