Int. J. of Nanomanufacturing   »   2012 Vol.8, No.5/6

 

 

Title: Towards fast AFM-based nanometrology and nanomanufacturing

 

Authors: Georg Schitter; Juergen Steininger; Friedjof C.A. Heuck; Urs Staufer

 

Addresses:
Vienna University of Technology, Automation and Control Institute (ACIN), Gusshausstrasse 27-29, A-1040 Vienna, Austria
Vienna University of Technology, Automation and Control Institute (ACIN), Gusshausstrasse 27-29, A-1040 Vienna, Austria
Robert Bosch GmbH, Corporate Sector Research and Advance Engineering, Robert Bosch Platz 1, D-70839, Gerlingen-Schillerhoehe, Germany
Department for Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628-CD Delft, The Netherlands

 

Abstract: Application of atomic force microscopes (AFMs) in production processes for nanometrology and nanomanufacturing is still hampered by the slow operation speed, by the low level of automation, and by insufficient control over production parameters for material deposition. This contribution discusses some recent development to improve the speed of AFMs by means of mechatronic system integration to improve the scanning speed and the bandwidth for controlling the probe-sample interaction, as well as advances from MEMS to functionalise AFM-probes for selective measurements and dip-pen nanolithography. The improved performance and functionality of the resulting prototype AFMs will enable better use of AFM technology in nanomanufacturing.

 

Keywords: nanometrology; nanomanufacturing; atomic force microscopy; AFM; nanolithography; nanotechnology; mechatronics integration; scanning speed; bandwidth; probe-sample interaction; MEMS; microelectromechanical systems.

 

DOI: 10.1504/IJNM.2012.051109

 

Int. J. of Nanomanufacturing, 2012 Vol.8, No.5/6, pp.392 - 418

 

Submission date: 20 Feb 2012
Date of acceptance: 28 Jul 2012
Available online: 20 Dec 2012

 

 

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