Title: Research on CMP performances of flower-like porous alumina abrasives with different pore sizes
Authors: Naijing Bu
Addresses: Research Centre of Nano-science and Nano-technology, Shanghai University, Shanghai 200444, China
Abstract: Flower-like porous alumina abrasives with different pore sizes were synthesised by hydrothermal synthesis method and characterised using transmission electron microscopy (TEM) and nitrogen sorption methods. Then the chemical mechanical polishing (CMP) performances on hard disk substrates were studied. The results showed that the increase of rotation speed and down force could enhance the material removal amount (MRA). It was also found that the proper pore size (6.27 nm) had advantages in MRA and surface planarisation.
Keywords: chemical mechanical polishing; CMP; hard disk substrates; porous alumina; pore size; alumina abrasives; rotation speed; down force; material removal amount; surface planarisation.
International Journal of Abrasive Technology, 2012 Vol.5 No.3, pp.202 - 212
Received: 25 Jun 2012
Accepted: 18 Aug 2012
Published online: 30 Jul 2014 *