Int. J. of Nanomanufacturing   »   2012 Vol.8, No.1/2

 

 

Title: The system and the mechatronics of a pagoda type micro-CMM

 

Authors: Kuang-Chao Fan; Fang Cheng; Hung-Yu Wang; Jyun-Kuan Ye

 

Addresses:
Department of Mechanical Engineering, National Taiwan University, 1 Sec. 4, Roosevelt Rd., Taipei 10617, Taiwan; School of Instrument Science and Optoelectronic Engineering, Hefei University of Technology, 193 Tunxi Rd., Hefei 230009, China.
School of Instrument Science and Optoelectronic Engineering, Hefei University of Technology, 193 Tunxi Rd., Hefei 230009, China; School of Mechanical and Aerospace Engineering, Nanyang Technological University, 50 Nanyang Avenue 639798, Singapore.
Department of Mechanical Engineering, National Taiwan University, 1 Sec. 4, Roosevelt Rd., Taipei 10617, Taiwan.
Department of Mechanical Engineering, National Taiwan University, 1 Sec. 4, Roosevelt Rd., Taipei 10617, Taiwan

 

Abstract: This paper presents design considerations of a precision micro-CMM system and its mechatronic modules. The basic design concept is to meet the requirements of high stiffness, force balance, thermal balance, Abbe principle, metrology frame and vibration-free. Based on these criteria, a novel bridge of pagoda shape is designed and analysed by optimisation to verify its superior stiffness with force balance and thermal balance structure due to its symmetrical geometry. A high precision Z-ram design with co-axial counterweight and vibration suppression is presented. The design of a novel symmetrical coplanar XY-stage that observes the Abbe principle is explained. This micro-CMM has a measurement range of X: 20 mm, Y: 20 mm and Z: 10 mm. Driven by a commercial ultrasonic motor and fed back by a designed diffraction interference scale, each axis can achieve long stroke and nano-positioning motion. Adding a designed contact scanning measuring probe to the spindle, this system is able to measure any geometry of a part to nanometre resolution.

 

Keywords: micro-CMMs; pagoda bridge; co-planar stage; Abbe principle; contact probes; coordinate measuring machines; micromachines; stiffness; force balance; thermal balance; Abbe principle; metrology frame; vibration free; nanometre resolution; nanotechnology.

 

DOI: 10.1504/IJNM.2012.044656

 

Int. J. of Nanomanufacturing, 2012 Vol.8, No.1/2, pp.67 - 86

 

Available online: 01 Jan 2012

 

 

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