Title: Fabrication of carbon nanotubes field emitter arrays on the flexible substrate using reversal roller imprint lithography

Authors: Lei Yin; Hongzhong Liu; Yongsheng Shi; Xiaoning He; Yucheng Ding

Addresses: State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China. ' State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China. ' State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China. ' State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China. ' State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China

Abstract: Fabrication of carbon nanotubes (CNTs) field emitter arrays (FEAs) on flexible substrate was demonstrated with a novel microfabrication technique, namely, reversal roller imprint lithography (RRIL). In this process, CNTs paste was inkjetted coating onto a patterned roller mould and squeezed into the microstructures of the roller mould by an elasticity scraper, and then it was transferred to the flexible substrate with a suitable contact pressure. The field emission measurement showed that the turn-on field was about 2.3 V/?m at the emission current density of 10 ?A/cm². This process was suitable for the fabrication of flexible electronic devices with CNTs.

Keywords: reverse rolling imprint lithography; nanomanufacturing; carbon nanotubes; CNTs; field emitter arrays; FEAs; nanotechnology; flexible substrates; microfabrication; flexible electronic devices.

DOI: 10.1504/IJNM.2011.042479

International Journal of Nanomanufacturing, 2011 Vol.7 No.3/4, pp.383 - 390

Received: 11 Nov 2010
Accepted: 27 May 2011
Published online: 07 Mar 2015 *

Full-text access for editors Full-text access for subscribers Purchase this article Comment on this article