Int. J. of Nanomanufacturing   »   2011 Vol.7, No.3/4

 

 

Title: Fabrication of carbon nanotubes field emitter arrays on the flexible substrate using reversal roller imprint lithography

 

Authors: Lei Yin; Hongzhong Liu; Yongsheng Shi; Xiaoning He; Yucheng Ding

 

Addresses:
State Key Laboratory for Manufacturing Systems Engineering, Xi
an Jiaotong University, Xi
an 710049, China.
State Key Laboratory for Manufacturing Systems Engineering, Xi
an Jiaotong University, Xi
an 710049, China.
State Key Laboratory for Manufacturing Systems Engineering, Xi
an Jiaotong University, Xi
an 710049, China.
State Key Laboratory for Manufacturing Systems Engineering, Xi
an Jiaotong University, Xi
an 710049, China.
State Key Laboratory for Manufacturing Systems Engineering, Xi
an Jiaotong University, Xi
an 710049, China

 

Abstract: Fabrication of carbon nanotubes (CNTs) field emitter arrays (FEAs) on flexible substrate was demonstrated with a novel microfabrication technique, namely, reversal roller imprint lithography (RRIL). In this process, CNTs paste was inkjetted coating onto a patterned roller mould and squeezed into the microstructures of the roller mould by an elasticity scraper, and then it was transferred to the flexible substrate with a suitable contact pressure. The field emission measurement showed that the turn-on field was about 2.3 V/?m at the emission current density of 10 ?A/cm2. This process was suitable for the fabrication of flexible electronic devices with CNTs.

 

Keywords: reverse rolling imprint lithography; nanomanufacturing; carbon nanotubes; CNTs; field emitter arrays; FEAs; nanotechnology; flexible substrates; microfabrication; flexible electronic devices.

 

DOI: 10.1504/IJNM.2011.042479

 

Int. J. of Nanomanufacturing, 2011 Vol.7, No.3/4, pp.383 - 390

 

Submission date: 10 Nov 2010
Date of acceptance: 27 May 2011
Available online: 14 Sep 2011

 

 

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