Title: Virtual metrology-based engineering chain management by multi-classification of quality using support vector machine for semiconductor manufacturing
Author: Sumika Arima
Address: Graduate School of Systems and Information Engineering, University of Tsukuba, 1-1-1, Tennoudai, Tsukuba, Ibaraki 305-8573, Japan
Abstract: This paper suggested that engineering chain management (ECM) that manages technical information and the process is necessary for the semiconductor industry. A virtual metrology-based (VM) manufacturing management system was proposed. This system realised the ECM concept, succeeded in real-time quality prediction and served a consistent driver to actions of all divisions of work. Support vector machine (SVM) was applied to construct an accurate VM model that provided multi-class quality prediction of the product. Although only the equipment variable data of a real mass production factory was used as an input, the VM model predicted with 100% accuracy the quality of the product.
Keywords: quality management; virtual metrology; semiconductor manufacturing; engineering chain management; SVM; support vector machines; multi-classification; quality prediction; systems engineering; product quality.
Int. J. of Industrial and Systems Engineering, 2011 Vol.8, No.1, pp.1 - 18
Available online: 23 Jun 2011