Title: Short pulse laser micro/nano manufacturing: fundamentals and applications

Authors: Lan Jiang, Xin Li, Xi-Peng Zhang, Qiang-Hua Chen, Hai-Lung Tsai, Yong-Feng Lu

Addresses: Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China. ' Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China. ' Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China. ' Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China. ' Laser-Based Manufacturing Laboratory, Department of Mechanical and Aerospace Engineering, Missouri University of Science and Technology, Rolla, MO 65409, USA. ' Laser Assisted Nano Engineering Laboratory, Department of Electrical Engineering, University of Nebraska-Lincoln, Lincoln, Nebraska 68588-0511, USA

Abstract: Lasers, especially femtosecond lasers, open wide-range and exciting new possibilities in micro/nanomanufacturing of metals, polymers, semiconductors, ultrahard materials, transparent materials, and tissues. This paper reviews the fundamentals, applications and challenges of laser micro/nano manufacturing, including ultrashort laser materials interaction, laser direct-writing manufacturing, laser interference manufacturing, laser near-field manufacturing, laser manufacturing of nanoparticles and nanotubes, and laser assisted diamond crystals growth.

Keywords: laser materials interaction; laser direct-writing manufacturing; laser interference manufacturing; laser near-field manufacturing; short pulse lasers; laser nanomanufacturing; laser micromanufacturing; nanotechnology; nanoparticles; nanotubes; diamond crystals growth.

DOI: 10.1504/IJNM.2011.040719

International Journal of Nanomanufacturing, 2011 Vol.7 No.2, pp.126 - 142

Published online: 28 Feb 2015 *

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