Title: Improvement of two-photon induced photoreduction by using a metal ion solution with a high concentration of silver ions

Authors: Yong Son, Tae Woo Lim, Dong-Yol Yang, Prem Prabhakaran, Kwang-Sup Lee, Jocelyne Bosson, Olivier Stephan, Patrice L. Baldeck

Addresses: Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Science Town, Daejeon 305-701, Republic of Korea. ' Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Science Town, Daejeon 305-701, Republic of Korea. ' Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Science Town, Daejeon 305-701, Republic of Korea. ' Department of Advanced Materials, Hannam University, 461-6 Junmin-Dong, Yuseong-Gu, Daejeon 305-811, Republic of Korea. ' Department of Advanced Materials, Hannam University, 461-6 Junmin-Dong, Yuseong-Gu, Daejeon 305-811, Republic of Korea. ' Laboratoire de Physique Fondamentale et Appliquee, Universite d'Abobo-Adjame, 02 BP 801Abidjan 02, Cote d'Ivoire. ' Laboratoire de Spectrometrie Physique, Universite Joseph Fourier, CNRS (UMR 5588), BP 87, 38402 Saint Martin d'heres Cedex, France. ' Laboratoire de Spectrometrie Physique, Universite Joseph Fourier, CNRS (UMR 5588), BP 87, 38402 Saint Martin d'heres Cedex, France

Abstract: Fabrication of three-dimensional metallic microstructures is an important issue for various applications in electronics and nanophotonics. Precise metallic micropatterns were fabricated by the two-photon induced photoreduction (TPPR) process. The process employs the photoreduction of silver ions in a metal ion solution composed of silver nitrate (AgNO₃) and water-soluble polymer (poly(4-styrenesulfonique acid)). To improve the resolution and the uniformity of metallic micropatterns, a metal ion solution with a high concentration of silver ions was used, and the continuous forming window (CFW) of fabrication conditions was obtained by considering the mechanism of TPPR and heat effects during the process. Through this work, continuous silver lines and micropatterns with a minimum width of 560 nm were fabricated and their quality was verified.

Keywords: two-photon induced photoreduction; TPPR; metal ion solutions; metallic microstructure; electronics; nanophotonics; micropatterns; nanotechnology; silver ions; silver nitrate; water-soluble polymers; continuous forming window.

DOI: 10.1504/IJNM.2010.034785

International Journal of Nanomanufacturing, 2010 Vol.6 No.1/2/3/4, pp.219 - 230

Published online: 22 Aug 2010 *

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