Title: Synthesis and characterisation of nitrogen-doped ZnO thin films

Authors: Abdelkrim Mekki, Nouar Tabet, Mahmoud Hezam

Addresses: Physics Department, King Fahd University of Petroleum and Minerals, Dhahran 31261, Saudi Arabia. ' Physics Department, King Fahd University of Petroleum and Minerals, Dhahran 31261, Saudi Arabia. ' Physics Department, King Fahd University of Petroleum and Minerals, Dhahran 31261, Saudi Arabia

Abstract: Nitrogen doped ZnO thin films were prepared using a DC-Magnetron sputtering technique. The samples were investigated using X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD). XPS revealed the presence of nitrogen in the films prepared under high oxygen to nitrogen ratio N/O ≥ 5/1. One N 1s peak located at 397 eV binding energy (BE) was assigned to atomic nitrogen. The other located at a BE of 399 eV was assigned to N due to formation of oxynitride. The XRD spectrum of the samples prepared under N/O ratio ≥ 1/5 showed a single peak at 2θ – 33.6⁰ assigned to ZnO (002) plane indicating a strong texture along the c-axis. Both peaks were shifted toward lower angles, as compared to pure ZnO film, indicating an expansion of the unit cell as a result of the insertion of nitrogen in the lattice. The nanostructure of the films was investigated by atomic force microscopy.

Keywords: nitrogen doped zinc oxide; ZnO thin films; DC magnetron; nanotechnology; nanostructure.

DOI: 10.1504/IJNBM.2009.027715

International Journal of Nano and Biomaterials, 2009 Vol.2 No.1/2/3/4/5, pp.216 - 225

Published online: 08 Aug 2009 *

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