Title: Proposal of concurrent measurement method for spindle radial, axial and angular motions using concentric grating interferometers

Authors: Muhummad Madden, Masato Aketagawa, Yuria Ohkubo, Shohei Kimura, Hideki Maruyama, Satoru Higuchi, Eiki Okuyama

Addresses: Department of Mechanical Engineering, Nagaoka University of Technology, 1603-1 Kamitomioka-cho, Nagaoka, Niigata 940-2188, Japan. ' Department of Mechanical Engineering, Nagaoka University of Technology, 1603-1 Kamitomioka-cho, Nagaoka, Niigata 940-2188, Japan. ' Department of Mechanical Engineering, Nagaoka University of Technology, 1603-1 Kamitomioka-cho, Nagaoka, Niigata 940-2188, Japan. ' Department of Mechanical Engineering, Nagaoka University of Technology, 1603-1 Kamitomioka-cho, Nagaoka, Niigata 940-2188, Japan. ' Industrial Research Institute of Niigata Prefecture, 1-11-1 Abuminishi, Chuo-Ku, Niigata 950-0915, Japan. ' Industrial Research Institute of Niigata Prefecture, 1-11-1 Abuminishi, Chuo-Ku, Niigata 950-0915, Japan. ' Department of Mechanical Engineering, Akita University, 1-1 Tegatagakuenmachi, Akita 010-8502, Japan

Abstract: In this paper, we propose a measurement method for spindle radial, axial and angular motions using concentric circle grating interferometers. In this method, the grating is installed on top of the spindle. Three optical sensors, which consist of two interferometers, are fixed over the grating. One interferometer detects an interference signal between reflection lights from a fixed mirror and the grating for vertical displacement measurement. The other interferometer detects an interference signal between ±first diffraction lights from the grating for lateral displacement measurement. Using three optical sensors, radial, axial and angular motions of the spindle, can be measured concurrently.

Keywords: spindle motion; radial motion; axial motion; angular motion; grating; concurrent measurement; concentric grating interferometers; nanometre; optical sensors; displacement measurement.

DOI: 10.1504/IJSURFSE.2009.026612

International Journal of Surface Science and Engineering, 2009 Vol.3 No.3, pp.242 - 252

Published online: 20 Jun 2009 *

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