Title: Nanostructured MOEMS for spectral control of light

Authors: S. Boutami, M. Garrigues, J-L. Leclercq, X. Letartre, P. Viktorovitch

Addresses: Institut des Nanotechnologies de Lyon (INL), UMR CNRS 5270, Ecole Centrale de Lyon – F69134, Ecully Cedex, France. ' Institut des Nanotechnologies de Lyon (INL), UMR CNRS 5270, Ecole Centrale de Lyon – F69134, Ecully Cedex, France. ' Institut des Nanotechnologies de Lyon (INL), UMR CNRS 5270, Ecole Centrale de Lyon – F69134, Ecully Cedex, France. ' Institut des Nanotechnologies de Lyon (INL), UMR CNRS 5270, Ecole Centrale de Lyon – F69134, Ecully Cedex, France. ' Institut des Nanotechnologies de Lyon (INL), UMR CNRS 5270, Ecole Centrale de Lyon – F69134, Ecully Cedex, France

Abstract: We present the recent evolution of electrically actuable MOEMS interferometric devices based on a deformable stack of Indium Phosphide membranes from a simple one- dimensional (1D) vertical structure towards a new class of MOEMS devices (PC-MOEMS) combining horizontal two-dimensional (2D) photonic crystals and the 1D vertical multilayer stack. First we describe latest achievements for the conventional 1D approach with a record breaking selectivity achieved for a tunable band pass filter by using refractive confinement in the resonant cavity. Then we give some basic principles underlying the so-called 2.5D Micro-nano-photonics approach. A recent demonstration of a PC-MOEMS tunable filter is presented.

Keywords: MOEMS; microoptoelectromechanical systems; InP; indium phosphide membranes; Fabry-Perot; tunable filters; photonics; photonic crystals; Bloch modes; nanotstructures; nanotechnology; spectral control; light.

DOI: 10.1504/IJMPT.2009.024996

International Journal of Materials and Product Technology, 2009 Vol.34 No.4, pp.384 - 398

Published online: 06 May 2009 *

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