Title: Thermo-mechanical behaviour of a micromirror for laser-to-fibre active alignment using bimorphs with breakable tethers

Authors: Hajime Kitagawa, David J. Boteler, Y.C. Lee

Addresses: Department of Mechanical Engineering, University of Colorado at Boulder, Campus Box 427, Boulder, CO 80309, USA. ' Department of Mechanical Engineering, University of Colorado at Boulder, Campus Box 427, Boulder, CO 80309, USA. ' Department of Mechanical Engineering, University of Colorado at Boulder, Campus Box 427, Boulder, CO 80309, USA

Abstract: We will present a novel micromirror design in which tethered bimorph strips are used for mirror active alignment including beam steering and position fixing. A micromirror is attached to bimorphs that are prestressed at room temperature. A series of tethers link the bimorphs to the substrate to restrain their deformation. Breaking a tether by joule heating allows the deformation of the bimorph to increase, changing the mirror position and orientation for precision alignment. With a large number of tethers, an optimum alignment can be achieved after breaking a selected group of tethers. Experimental results of the devices fabricated confirm the beam steering and position fixing designed.

Keywords: bimorphs; breakable tethers; micromirror design; laser-to-fibre active alignment; beam steering; position fixing; thermo-mechanical behaviour; mirror active alignment; micromirrors; bimorph strips; deformation; optoelectronics; microelectromechanical systems; MEMS.

DOI: 10.1504/IJMPT.2009.022403

International Journal of Materials and Product Technology, 2009 Vol.34 No.1/2, pp.54 - 65

Published online: 04 Jan 2009 *

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