Title: Multiply-charged ion nanobeams

Authors: A. Cassimi, T. Muranaka, L. Maunoury, H. Lebius, B. Manil, B.A. Huber, T. Ikeda, Y. Kanai, T.M. Kojima, Y. Iwai, T. Kambara, Y. Yamazaki, T. Nebiki, T. Narusawa

Addresses: CIRIL, CEA/CNRS, BP 5133, F-14070 Caen Cedex 5, France. ' CIRIL, CEA/CNRS, BP 5133, F-14070 Caen Cedex 5, France. ' CIRIL, CEA/CNRS, BP 5133, F-14070 Caen Cedex 5, France. ' CIRIL, CEA/CNRS, BP 5133, F-14070 Caen Cedex 5, France ' CIRIL, CEA/CNRS, BP 5133, F-14070 Caen Cedex 5, France. ' CIRIL, CEA/CNRS, BP 5133, F-14070 Caen Cedex 5, France. ' Atomic Physics Laboratory, Riken, 2-1 Hirosawa, Wako, Saitama 351-0198, Japan. ' Atomic Physics Laboratory, Riken, 2-1 Hirosawa, Wako, Saitama 351-0198, Japan. ' Atomic Physics Laboratory, Riken, 2-1 Hirosawa, Wako, Saitama 351-0198, Japan. ' Atomic Physics Laboratory, Riken, 2-1 Hirosawa, Wako, Saitama 351-0198, Japan. ' Atomic Physics Laboratory, Riken, 2-1 Hirosawa, Wako, Saitama 351-0198, Japan; Institute of Physics, University of Tokyo, Meguro, Tokyo 153-8902, Japan. ' Kochi University of Technology, Tosa Yamada, Kochi 782-8502, Japan. ' Kochi University of Technology, Tosa Yamada, Kochi 782-8502, Japan

Abstract: Due to the strong evolution in the field of nanotechnologies and the continuous miniaturisation of electronic components, multiply-charged ion nanobeams would be a promising tool in this field of research. Either for surface modification or local (nanometre scale) surface analysis purposes, studying the feasibility of such beams is of strong interest. In the present contribution, we present a focusing technique based on the self-organised charge-up of a simple glass |funnel|.

Keywords: multiply charged ions; tapered glass tubes; nanobeams; patterning; surface analysis; charge exchange; nanotechnology; electronic components; surface modification.

DOI: 10.1504/IJNT.2008.018699

International Journal of Nanotechnology, 2008 Vol.5 No.6/7/8, pp.809 - 817

Published online: 14 Jun 2008 *

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