Title: Effect of temperature on nano-scale adhesion for MEMS

Authors: Liao Ningbo, Yang Ping

Addresses: Research Center of Micro-Nano Science and Technology, Jiang Su University, Zhenjiang, 212013, PR China. ' Research Center of Micro-Nano Science and Technology, Jiang Su University, Zhenjiang, 212013, PR China

Abstract: Molecular dynamics simulation of adhesion behaviour during sliding friction between different materials is proposed. The Newton|s equations of motion are established by using Morse potential function. The improved Verlet algorithm is employed to solve atom trajectories. Simulation show that adhesion tends to occur when the system|s temperature increases sharply. There are few direct experimental measurements of the adhesion between surfaces of metals because it is very costly. The effects of such variables as block temperature, material properties are very hard to measure experimentally. The model is meaningful to delay or to prevent adhesion in MEMS by selecting the proper parameters.

Keywords: molecular dynamics; MEMS; microelectomechanical systems; temperature; nanoscale adhesion; interfacial friction; simulation; sliding friction.

DOI: 10.1504/IJMPT.2008.018032

International Journal of Materials and Product Technology, 2008 Vol.31 No.2/3/4, pp.354 - 364

Published online: 27 Apr 2008 *

Full-text access for editors Full-text access for subscribers Purchase this article Comment on this article