Title: 2D and 3D growth of carbon nanotubes on substrates, from nanometre to millimetre scales
Author: A. John Hart, Hayden K. Taylor, Alexander H. Slocum
Department of Mechanical Engineering, University of Michigan, Ann Arbor, MI, USA.
Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, MA, USA.
Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA
Abstract: This paper presents a suite of techniques for making Carbon Nanotube (CNT) assemblies having hierarchical two- and three-dimensional organisation: conformal films of tangled single-walled CNTs are grown on silicon microstructures, millimetre-thick films and microstructures of aligned Multi-wall CNTs (MWNTs) are grown on flat silicon substrates, large-area CNT micropatterns are fabricated by post-growth dry embossing of aligned CNT films and 3D forms of CNTs are directly grown to take the shape of microfabricated template. These growth processes use catalyst thin-films deposited by electron beam evaporation and atmospheric-pressure thermal Chemical Vapour Deposition (CVD), which is scalable from academic-level prototyping to industrial-level manufacturing.
Keywords: carbon nanotubes; CNTs; nanostructures; growth; chemical vapour deposition; CVD; dry embossing; microfabrication; patterning; silicon microstructures; moulding; electron beam evaporation; thin films; nanomanufacturing; nanotechnology.
Int. J. of Nanomanufacturing, 2007 Vol.1, No.6, pp.701 - 709
Available online: 25 Apr 2008