Title: Fabrication and wear of nitrogen-doped diamond microtools

Authors: Mark J. Jackson, Waqar Ahmed

Addresses: Centre for Advanced Manufacturing and Birck Nanotechnology Centre, College of Technology, Purdue University, West Lafayette, IN 47907-2021, USA. ' Nanotechnology and Advanced Materials Research Centre, University of Ulster, Newtownabbey, County Antrim, Northern Ireland, BT37 0QB, UK

Abstract: Chemical vapour deposited diamond films have many industrial applications but are assuming increasing importance in the area of microfabrication, most notably in the development of diamond-coated microtools. For these applications the control of structure and morphology is of critical importance. The crystallite size, orientation, surface roughness and the degree of sp³ character have a profound effect on the machining properties of the films deposited. In this paper, experimental results are presented on the effects of nitrogen doping on the surface morphology, crystallite size, and wear of microtools. It is concluded that the magnitude of tensile stresses induced in the diamond grain by grinding forces at the rake face is the best indicator of tool wear during the grinding process.

Keywords: diamond microtools; cutting tools; microengineering; characterisation; surface engineering; CVD; nanomanufacturing; chemical vapour deposition; tool wear; fabrication; microfabrication; diamond coatings; nitrogen doping; surface morphology; crystallite size; tensile stresses; grinding forces; rake face.

DOI: 10.1504/IJNM.2007.013685

International Journal of Nanomanufacturing, 2007 Vol.1 No.3, pp.430 - 453

Published online: 11 May 2007 *

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