Study on the sticking materials on tools in micromilling of single crystalline silicon
by X. Cheng; X.H. Yang; G.M. Zheng; R.F. Xu; L. Li
International Journal of Manufacturing Technology and Management (IJMTM), Vol. 31, No. 5, 2017

Abstract: It is noticed some materials are stuck to micro tools in micromilling of single crystalline silicon and tool geometries have been changed greatly. Consequently, ductile-regime material removal cannot be realised sometimes even using the same micro tool and process parameters. Based on EDS analysis, elements of the sticking materials are identified. The dominant sticking materials are estimated as SiO2 and the sticking phenomenon has been explained in a chemical reaction way. Countermeasures to remove the sticking materials are proposed and examined. It is found that alkali solution can work well to remove these materials and the feasible removal time is one minute. Finally, an in-process interval cleaning method using alkali solution is proposed and verified in micromilling of the single crystalline silicon. By the proposed method, batch production of silicon substrate used in MEMS becomes possible from the micro cutter point of view.

Online publication date: Mon, 11-Dec-2017

The full text of this article is only available to individual subscribers or to users at subscribing institutions.

 
Existing subscribers:
Go to Inderscience Online Journals to access the Full Text of this article.

Pay per view:
If you are not a subscriber and you just want to read the full contents of this article, buy online access here.

Complimentary Subscribers, Editors or Members of the Editorial Board of the International Journal of Manufacturing Technology and Management (IJMTM):
Login with your Inderscience username and password:

    Username:        Password:         

Forgotten your password?


Want to subscribe?
A subscription gives you complete access to all articles in the current issue, as well as to all articles in the previous three years (where applicable). See our Orders page to subscribe.

If you still need assistance, please email subs@inderscience.com