Temperature effect on structural, optical and NH₃ gas sensing properties of TeO₂ thin films
by M. Manouchehrian
International Journal of Materials and Structural Integrity (IJMSI), Vol. 11, No. 1/2/3, 2017

Abstract: TeO₂ thin films with different temperatures (400, 450 and 500°C) were deposited on glass substrates by thermal evaporation technique from a Te powder. XRD patterns indicate that as the temperature increases, the crystallisation improves. Observing the images obtained by SEM, it is seen that the grain size decreases as the temperature increases. The optical energy gap of the films was determined from transmittance and reflectance spectra. The optical energy gap decreased continuously from 3.95 eV to 3.80 eV with increasing temperature. Studying the effect of deposition temperature on NH₃ gas measurement, it became obvious that as the deposition temperature increases, the sensitivity increases and the response and recovery times decrease.

Online publication date: Fri, 13-Oct-2017

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