Properties of multi-walled carbon nanotubes synthesis on porous silicon by double furnace thermal-CVD technique Online publication date: Tue, 28-Jun-2016
by F.S. Husairi; A.Z. Zainurul; M. Rusop; S. Abdullah
International Journal of Materials Engineering Innovation (IJMATEI), Vol. 7, No. 1, 2016
Abstract: Multi-walled carbon nanotubes (MWCNs) were synthesised using double-furnace thermal chemical vapour deposition technique at 700-900°C on porous silicon nanostructure (PSiNs). Palm oil was used as a carbon natural source, ferrocene as a catalyst and nitrogen gas as a carrier gas. The precursor were vaporised at 475°C carried by nitrogen gas which flow at constant rate of 150 sccm/min. Carbon nanotubes (CNTs) were characterised by using Raman spectroscopy and field emission scanning electron microscopy (FESEM) to check its structure and crystallites before being tested with I-V probe. Au contact was used as a metal contact deposited on CNTs layer. CNTs with uniform diameter were found grown on porous silicon for each temperature used. Based on micro-Raman spectroscopy result, the peak of CNTs (around 1,300 to 1,600 nm) was detected. The I-V characteristic of CNTs deposited had different profile when deposited at different temperatures.
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