Fabrication and characterisation of piezoelectric microcantilever array with carbon nanotube tips assembled by nano-handling
by Tianlei Zhang; Gang Zhao; Jiaru Chu; Wenhao Huang; Malte Bartenwerfer; Volkmar Eichhorn; Sergej Fatikow
International Journal of Nanomanufacturing (IJNM), Vol. 10, No. 3, 2014

Abstract: Piezoelectric microcantilever transducers based on lead zirconate titanate (PZT) thin film have received considerable interest because of their wide potential applications in nanotechnology, biosensors and microelectromechanical systems. In this work a self-sensing and self-actuating PZT piezoelectric cantilever array is designed and fabricated for parallel dynamic atomic force microscope (AFM) imaging. Carbon nanotube (CNT) tips are assembled to some cantilevers of the array by nano-handling to enhance the imaging quality. Detailed fabrication process of the array and nano-assembly of CNT tips are reported and characterisations of ferroelectric, piezoelectric and mechanical properties of the array are carried out and presented in this paper.

Online publication date: Sat, 17-May-2014

The full text of this article is only available to individual subscribers or to users at subscribing institutions.

 
Existing subscribers:
Go to Inderscience Online Journals to access the Full Text of this article.

Pay per view:
If you are not a subscriber and you just want to read the full contents of this article, buy online access here.

Complimentary Subscribers, Editors or Members of the Editorial Board of the International Journal of Nanomanufacturing (IJNM):
Login with your Inderscience username and password:

Username:        Password:          Forgotten your password?

Want to subscribe?
A subscription gives you complete access to all articles in the current issue, as well as to all articles in the previous three years (where applicable). See our Orders page to subscribe.

If you still need assistance, please email subs@inderscience.com