Fabrication of carbon nanotubes field emitter arrays on the flexible substrate using reversal roller imprint lithography Online publication date: Sat, 07-Mar-2015
by Lei Yin; Hongzhong Liu; Yongsheng Shi; Xiaoning He; Yucheng Ding
International Journal of Nanomanufacturing (IJNM), Vol. 7, No. 3/4, 2011
Abstract: Fabrication of carbon nanotubes (CNTs) field emitter arrays (FEAs) on flexible substrate was demonstrated with a novel microfabrication technique, namely, reversal roller imprint lithography (RRIL). In this process, CNTs paste was inkjetted coating onto a patterned roller mould and squeezed into the microstructures of the roller mould by an elasticity scraper, and then it was transferred to the flexible substrate with a suitable contact pressure. The field emission measurement showed that the turn-on field was about 2.3 V/?m at the emission current density of 10 ?A/cm2. This process was suitable for the fabrication of flexible electronic devices with CNTs.
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