Preparation and characterisation of α-alumina/ferric oxide composite abrasive
by Qionglin Yan, Hong Lei
International Journal of Abrasive Technology (IJAT), Vol. 2, No. 4, 2009

Abstract: Abrasive particles are the key elements of chemical-mechanical polishing (CMP) slurry. α-alumina abrasive, commonly used in CMP slurry, often causes scratches in the polished surface because of its agglomeration and high hardness. In this paper, a kind of novel α-alumina/ferric oxide core-shell type abrasive was prepared by coating a film of ferric oxide on the surface of α-Al₂O₃ particles with a chemical coprecipitation method. The α-alumina/ferric oxide composite particles were characterised by time-of-flight secondary ion mass spectroscopy (TOF-SIMS), X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD) and laser particle size analyser. The results show that Fe₂O₃ has been successfully coated on the surface of α-alumina particles and the dispersibility of the composite particles is better than that of pure α-Al₂O₃ particles.

Online publication date: Tue, 03-Nov-2009

The full text of this article is only available to individual subscribers or to users at subscribing institutions.

 
Existing subscribers:
Go to Inderscience Online Journals to access the Full Text of this article.

Pay per view:
If you are not a subscriber and you just want to read the full contents of this article, buy online access here.

Complimentary Subscribers, Editors or Members of the Editorial Board of the International Journal of Abrasive Technology (IJAT):
Login with your Inderscience username and password:

Username:        Password:          Forgotten your password?

Want to subscribe?
A subscription gives you complete access to all articles in the current issue, as well as to all articles in the previous three years (where applicable). See our Orders page to subscribe.

If you still need assistance, please email subs@inderscience.com